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Основной контент книги Lithography
Text PDF

Volume 405 pages

0+

Lithography

Read only on Litres

The book cannot be downloaded as a file, but can be read in our app or online on the website.

$204

About the book

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

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Age restriction:
0+
Release date on Litres:
05 April 2018
Volume:
405 p.
ISBN:
9781118621233
Total size:
8.5 МБ
Total number of pages:
405
Copyright holder:
John Wiley & Sons Limited
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