Основной контент книги Lithography
Text PDF
Volume 405 pages
Lithography
author
Stefan Landis
$204
About the book
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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Age restriction:
0+Release date on Litres:
05 April 2018Volume:
405 p. ISBN:
9781118621233Total size:
8.5 МБTotal number of pages:
405Copyright holder:
John Wiley & Sons Limited