Основной контент книги Plasma Nanoscience
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Volume 566 pages
Plasma Nanoscience
Basic Concepts and Applications of Deterministic Nanofabrication
author
kostya ostrikov
$201.60
About the book
Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.
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Age restriction:
0+Release date on Litres:
22 August 2019Volume:
566 p. ISBN:
9783527623310Total size:
14 МБTotal number of pages:
566Copyright holder:
John Wiley & Sons Limited