Wafer Manufacturing

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Shaping of Single Crystal Silicon Wafers
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Book description

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

Detailed info
Age restriction:
0+
Size:
307 pp.
ISBN:
9781118696255
Total size:
11 MB
Total number of pages:
307
Page size:
x мм
Publisher:
Wiley
Copyright:
John Wiley & Sons Limited
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